In order to enrich the N content at the outer surface of Dow Cyclotene, a low permittivity polymer, a 3 keV N-2(+) beam was used to implant N at various angles. Both in situ XPS analysis of the modified surface and the initial coalescence behavior of Cu clusters deposited by evaporation demonstrated that a lower angle between the beam and the surface led to N enrichment at the surface but not to the extent offered by a N-2(+) plasma. The reason for this is discussed. (C) 2002 Elsevier Science B.V. All rights reserved.