화학공학소재연구정보센터
Applied Surface Science, Vol.203, 310-313, 2003
Using SIMS and the NIST standard reference material #2137 to calibrate standards used in the B-11 (p, alpha) Be-8 nuclear reaction analysis of B in Si
Two different methods of using SIMS have been utilized in confirming the dose of a B-11 implanted Si reference material that has been used for many years in determining doses of B-11 ion-implanted into silicon using the B-11 (p, alpha)Be-8 nuclear reaction analysis technique. Both methods are based on the NIST SRM 2137. One method uses a B bulk-doped Si sample to transfer the calibration from the B-10 of the NIST SRM to the B-11 of the NRA standard. The other method uses two identical implants, one of B-10 and one of B-11 to accomplish the calibration transfer. The dose of the NRA standard was found to be within 5% of the quoted dose for the standard that had been used for years. (C) 2002 Elsevier Science B.V. All rights reserved.