The DNA molecules on a vicinal Si(l 11) Substrate with steps of single and double bi-atomic layers are imaged by noncontact atomic force microscopy (nc-AFM) in ultrahigh vacuum. The water solution containing pBR322 plasmid DNA molecules digested by Cla I is dropped on the substrate in a pure nitrogen atmosphere in a glove box, which is connected to the introduction chamber of the AFM. The ends of DNA molecules are frequently folded and pinned at the steps on the substrate, and the DNA strings often lie along the step. The chemical and dipole interactions between the DNA and the semiconductor substrate seem to play an important role in folding, pinning and sticking on the Si(111) substrate. (C) 2002 Elsevier Science B.V. All rights reserved.