Thin film properties, such as surface morphology, internal stress and surface energy, of hexagonal boron nitride/copper mixtures, produced by a magnetron co-sputtering deposition technique, were investigated. Techniques included scanning electron microscopy, film deflection and contact angle measurements. It was possible to fabricate nano-scale islands on the surface of the film and to control the size of the islands by adjusting the sputter discharge conditions. The internal stress and surface energy can be significantly modified depending on these conditions indicating that they are dependent variables. This technique of co-sputtering deposition is a promising candidate for the control of nano-structures on a surface and for controlling internal stress and surface energy. (C) 2002 Elsevier Science B.V. All fights reserved.