Thin films Of SiO2 and La2O3 were prepared on a glass substrate by a dip-coating process from specially formulated sols. The tribological properties of the resulting thin films sliding against a Si3N4 ball were evaluated on a one-way reciprocating friction and wear tester. The morphologies of the unworn and worn surfaces of the films were examined by an atomic force microscope (AFM) and a scanning electron microscope (SEM). La2O3 shows the best tribological performance. The coefficient of friction is about 0.1 and the wear life is over 5000 sliding passes both under higher (3 N) and lower load (1 N). The SiO2 film derived from a specially formulated aqueous solution shows much better performance in resisting wear and reducing friction than the one derived from an ethanol solution. The wear mechanisms of the films are discussed based on SEM observation of the worn surface morphologies. SEM observation of the morphologies of worn surfaces indicates that the worn surface of La2O3 is too slight to be observed by SEM. The wear of SiO2 derived from TEOS solution is the characteristic of delaminating, which is responsible for the abrupt failure of the film. The wear of SiO2 derived from aqueous solution is the characteristic of fracture. Brittle fracture and severe abrasion dominate the wear of glass substrate.