화학공학소재연구정보센터
Journal of Crystal Growth, Vol.303, No.1, 345-348, 2007
Mechanism of n-doping of silicon carbide epitaxial films
A kinetic model for the n-type doping of SiC is presented. The attention is focalized both on a complete chemical mechanism, with elementary reactions, and on a lumped one; these mechanisms are then used in a 1-D model of a Horizontal Hot Wall Reactor to obtain doping profiles during crystal growth. (c) 2006 Elsevier B.V. All rights reserved.