Lanthanum strontium manganate (La0.7Sr0.3MnO3: LSMO) thin films were grown on SiO2/Si substrates by a metallo-organic decomposition method, and their crystalline structure, microstructure and electrical properties were investigated. X-ray diffraction analysis indicated that La0.7Sr0.3MnO3 films With a perovskite single phase could be obtained by annealing at 700 degrees C. Transmission electron microscopy (TEM) images showed that the films consisted of packed grains with a mean grain size of approximately 25 nm. The resistivity of the La0.7Sr0.3MnO3 films decreased rapidly as the annealing temperature increased from 550 to 700 degrees C, and did not change greatly with increasing annealing temperature from 700 degrees C. The La0.7Sr0.3MnO3 films annealed at 700 degrees C had a lower resistivity of 5.70 x 10(-4) Omega m. (c) 2006 Elsevier B.V. All rights reserved.