화학공학소재연구정보센터
Journal of Crystal Growth, Vol.288, No.2, 241-246, 2006
Apparent band-gap shift in InN films grown by remote-plasma-enhanced CVD
The properties of indium nitride grown at various temperatures on c-plane sapphire and glass substrates, using remote plasma-enhanced chemical vapour deposition, have been investigated. The optical absorption spectra show a broad range of apparent band-gap values from approximately 2.3-0.9eV, depending on the growth temperature. The influence of growth temperature on crystallinity, level of impurity incorporation, stoichiometry, and lattice distortion Lire analysed. The possible causes of the apparent band-gap shift in indium nitride Lire discussed. (c) 2006 Elsevier B.V. All rights reserved.