Recent progress in the fabrication of ultraviolet (UV) ZnO light-emitting devices using filtered cathodic vacuum arc (FCVA) technique is reviewed. The design and fabrication of ZnO optical waveguides are investigated. The phenomenon of random laser action in ZnO suggests efficient UV lasing from the ZnO waveguide under optical excitation can be achieved. The methods of eliminating the undesired optical characteristics of random laser action such as high scattering loss, non-axial radiation and multiple wavelength emission are also studied. Furthermore, the fabrication of UV ZnO heterojunction light-emitting diodes is described. (c) 2005 Elsevier B.V. All rights reserved.