Journal of Crystal Growth, Vol.279, No.3-4, 293-302, 2005
MBE growth and properties of GaAsSbN/GaAs single quantum wells
The growth and properties of GaAsSbN single quantum wells (SQWs) are investigated in this work. The heterostructures were grown on GaAs substrates in an elemental solid source molecular beam epitaxy (MBE) system assisted with a RF plasma nitrogen source. A systematic study has been carried out to determine the influence of various growth conditions, such as the growth temperature and the source shutter-opening sequence, on the quality of the grown layers and the incorporation of N and Sb. The effects of ex situ and in situ annealing under As overpressure on the optical properties of the layers have also been investigated. Substrate temperature in the range of 450-470 degrees C was found to be optimum. Simultaneous opening of the source shutters was found to yield sharper QW interfaces. N and Sb incorporations were found to depend strongly upon substrate temperatures and source shutter-opening sequences. A significant increase in PL intensity with a narrowing of PL line shape and blue shift in emission energy were observed on annealing the GaAsSbN/GaAs SQW, with in situ annealing under As overpressure providing better results, compared to ex situ annealing. (c) 2005 Elsevier B.V. All rights reserved.
Keywords:high-resolution X-ray diffraction;reflection high-energy electron diffraction;molecular beam epitaxy;quantum wells;nitride;semiconducting III-V materials;long wavelength laser diodes