화학공학소재연구정보센터
Journal of Crystal Growth, Vol.266, No.1-3, 303-312, 2004
Modeling and simulation of AlN bulk sublimation growth systems
In this paper, we have developed a numerical model to simulate two AIN sublimation growth systems. Temperature distributions in the growth cell for resistance and induction heating systems are presented and compared. The growth rate has been predicted and compared with experimental data. An anisotropic thermomechanical stress model is also developed to predict the thermal stress distribution in the as-grown crystal, with or without contact with the crucible wall. (C) 2004 Elsevier B.V. All rights reserved.