A tungsten plate was set on a one-plate electrode in RF plasma using parallel plates in a mixed gas of argon (9.75 Torr) and oxygen (0.25 Torr). Zn smoke was introduced into the plasma field. W atoms were doped in the ZnO smoke formation field in the RF plasma system. The resulting particles with a size of 30 run were identified to be hexagonal ZnO particles. The collected particles changed from white to yellow, i.e., W atoms were doped into ZnO particles. The image of the (0 0 0 1) lattice, which is the forbidden reflection, appeared predominantly in the W-doped ZnO particle. Furthermore, by optical measurement. it Was found that the existence of W atoms can control the recombination radiation due to the exciton. On the basis of high-resolution transmission electron microscopic images, the doped W positions are discussed as being in the commensurate Configuration of W items in the ZnO crystal at positions equivalent to those in the cubic anti-fluoride structure. (C) 2004 Elsevier B.V. All rights reserved.