Residual stresses and texture in La2/3Sr1/3MnO3 (LSMO) thin films have been investigated. The films were deposited on (100) LaAlO3 (LAO) and (100) MgO single crystals by liquid delivery-metal organic chemical vapor deposition (LD-MOCVD). X-ray diffraction (XRD) pole figures showed (001)(LSMO)//(001)(LAO) and (001)(LSMO)//(001)(MgO) preferred orientation. Residual stresses were calculated using a modified sin(2) psi method, crystallite group method (CGM), assuming a biaxial stress state. Compressive stresses on the order of 224 and 1150 MPa were obtained for LSMO films deposited on LAO (LSMO/LAO) and MgO (LSMO/MgO), respectively. (C) 2003 Elsevier B.V. All rights reserved.