화학공학소재연구정보센터
Journal of Crystal Growth, Vol.250, No.1-2, 183-188, 2003
Analysis of magnetic field effect on 3D melt flow in CZ Si growth
Three-dimensional turbulent melt convection in an industrial Czochralski Si-crystal growth system subjected to action of an axial stationary magnetic field is numerically simulated using a hybridization of the Reynolds-averaged Navier-Stokes approach and large-eddy simulation. The proposed RANS/LES model is based on a differential model of turbulence. The results obtained with three computational models differing in the number of considered hot-zone components are presented and compared with the experimental data for temperature in the melt and along the melt-crucible surface. The influence of electrical currents in the crystal on melt motion reorganization is studied. (C) 2002 Elsevier Science B.V. All rights reserved.