LiCoO2 films are prepared on Si substrates by a sol-gel growth method. Two raw materials. Li acetate (99%) and Co (99%) acetate. are mixed in the atomic ratio Li:Co of 1:1 and dissolved in methanol to ether with citric acid as a chelating agent. The stoichiometory of the raw materials is more severely required for the preparation of a single-phase LiCoO2. The raw materials spin-coated oil Si substrates Lire annealed at various temperatures (300-800degreesC) for 30 min under 0, flow. The structural identification is performed using X-ray diffraction and Raman scattering methods. These results show that the structural transformation from the spinel Structure to the layered-rock-salt one occurs at 600degreesC. (C) 2002 Elsevier Science B.V. All rights reserved.