Journal of Crystal Growth, Vol.233, No.3, 541-547, 2001
Liquid phase silicon at the front of crystallization during SiCPVT growth
Formation of liquid phase silicon at the growth front during the process of SiC PVT growth is considered to be among the factors leading to the formation of structural defects in SiC. A brief thermodynamic analysis of the Si liquid phase development was carried out in the temperature range of 1500-3150K. The possibility of Si liquid phase formation at the seeding surface during SiC PVT growth has been experimentally demonstrated.