Journal of Crystal Growth, Vol.230, No.3-4, 341-345, 2001
Lateral confined epitaxy of GaN layers on Si substrates
We developed a novel, simple procedure for achieving lateral confined epitaxy (LCE). This procedure enables the growth of uncracked GaN layers on a Si substrate, using a single, continuous metalorganic chemical vapor deposition (MOCVD) run. The epitaxial growth of GaN is confined to mesas, defined by etching into the Si substrate prior to the growth. The LCE-GaN layers exhibit improved morphological and optical properties compared to the plain GaN-on-Si layers grown in the same MOCVD system. By performing a set of LCE growth runs on mesas of varying lateral dimensions, we specified the crack-free range of GaN on Si as 14.0 +/- 0.3 mum.
Keywords:defects;stresses;metalorganic chemical vapor epitaxy;selective epitaxy;semiconducting gallium compounds