화학공학소재연구정보센터
Journal of Crystal Growth, Vol.227, 1140-1145, 2001
Optimisation of MBE growth conditions for InAs quantum dots on (001) GaAs for 1.3 mu m luminescence
We present a study of the optimised growth conditions for InAs quantum dots (QDs) grown on GaAs substrates by solid source molecular beam epitaxy (SSMBE). Growth conditions for best luminescence intensity and linewidth were found within narrow windows of substrate temperature (500 520 degreesC) and nominal InAS layer thickness (3.3-3.7 monolayers). The emission wavelength of such InAs QDs capped by GaAs was around 1.24 mum. However. this is redshifted to 1.3 mum or more by capping the InAs QDs with a thin layer of InxGa1-xAs. The results show that both In content and thickness of the capping layer can be used to tune the emission wavelength. Atomic force microscopy images show that the surface recovers to two-dimensional when depositing In0.2Ga0.8As while remaining three-dimensional when depositing In0.4Ga0.6As.