화학공학소재연구정보센터
Journal of Crystal Growth, Vol.227, 1069-1072, 2001
Indium segregation in the fabrication of InGaAs concave disks by heterogeneous droplet epitaxy
We have studied the effects of As-4 flux intensity during crystallization process and sample temperature during annealing process on the structural and optical properties of InGaAs (quantum dots) QDs fabricated bp heterogeneous droplet epitaxy method. The QDs formation mechanism including In segregation and InAs-GaAs intermixing was investigated. We found the very wide optimum growth conditions, such as photoluminescence peak energy is constant, intensity is maximum value and full-width at half-maximum is minimum value.