화학공학소재연구정보센터
Journal of Crystal Growth, Vol.227, 1016-1019, 2001
Comparison of InAs islands self-assembled on pseudomorphic and metamorphic InAlAs buffer layers grown on GaAs substrate
In this work, MBE growth of InAs islands on InAlAs layers lattice mismatchcd to GaAs substrates has been studied. Both pseudomorphic and metamorphic InAlAs buffer layers were used as a template prior to the deposition of InAs. The effects of incorporating aluminium atoms in the buffer layer and the strain relaxation in the InAlAs layer os well as the InAs coverage on the density and the size of the islands are shown.