화학공학소재연구정보센터
Journal of Crystal Growth, Vol.225, No.2-4, 231-235, 2001
Comparison of inductively coupled plasma-mass spectrometry, neutron activation analysis, and Hall effect techniques using antimony doped germanium
Three independent characterization techniques, Hall effect, neutron activation analysis (:NAA) and inductively coupled plasma-mass spectrometry (ICP-MS) were investigated to measure the antimony (Sb) concentration in Sb-doped germanium single crystals. The three LEC grown crystals had initial Sb concentrations ranging from 1 x 10(15) to 1 x 10(17)at/cm(3). The agreement between these three techniques was very good, averaging 15% below the Hall effect measurements for the ICP-MS measurements and averaging 2% below the Hall effect measurements for the NAA measurements. It was also found that the ICP-MS technique had the least variation among the three techniques.