화학공학소재연구정보센터
Journal of Crystal Growth, Vol.210, No.1-3, 370-374, 2000
A quantitative approach to Makyoh (magic-mirror) topography
A geometrical optical model of Makyoh-topography image formation is presented. Fundamental features of the imaging are established. Computer simulations and experimental images of a semiconductor wafer are presented to illustrate the model.