Journal of Crystal Growth, Vol.210, No.1-3, 182-186, 2000
Cleavage of thin films for X-HREM study of interface quality in heterostructures
A thin-him cleavage technique has been developed to produce high-quality cross-sectional samples for HREM studies of heterostructures. The thickness of these samples gradually decreases down to a few monolayers, with no preparation-induced damages or irregular relief. The technique is illustrated on the example of the (3 1 1)A and (1 0 0)GaAs/AlAs superlattices.