화학공학소재연구정보센터
Journal of Crystal Growth, Vol.209, No.4, 767-772, 2000
Rapid enlargement of SiC single crystal using a cone-shaped platform
We investigated the enlargement of SiC single crystal during physical vapor transport growth by modifying the shape of graphite lid. The single crystals grown on the cone-shaped platform were larger in diameter than those grown on the conventional one. The enlargement of ingot is discussed in terms of the dual role of polycrystals during crystal growth: (i) it provides a platform for single crystal and (ii) an obstacle to the lateral growth of ingot. The dependence of the broadening angle (beta) of single crystal on the taper angle (theta) of the cone-shaped platform was also investigated and an optimum angle at a given growth condition found.