In this work, cadmium sulfide (CdS) films were prepared by ultrasonic spray pyrolysis (USP) technique onto glass substrates at different temperatures ranging from 473 to 623 K in 50 K steps, using aqueous solution of cadmium chloride and thiourea salts. The structural, optical and electrical properties of the prepared films were analyzed by X-ray diffraction, absorbance spectra and current-voltage (I-V) characteristics, respectively. After all investigations, it was concluded that 573 K substrate temperature is suitable for producing US films with USP technique and the examined properties (good crystallinity and low resistivity) of this film show its feasibility for technological purposes, especially for solar cells. (c) 2005 Elsevier B.V. All rights reserved.