A photosensitive polyimide (PSPI) containing TiO2 nano particles was prepared by the sol-gel method. The PSPI is based on benzophenone-3,3',4,4'-tetracarboxylic dianhydride (BTDA) and 4,4'-diamino-3,3'-dimethyldiphenylmethane (MMDA) and is intrinsically photosensitive. The chemical and morphological structure of the hybrid materials was characterized by Fourier transform infrared spectroscopy (FT-IR) and transmission electron microscopy (TEM). The TiO2 particles are well dispersed in the PI matrix and 50 nm in diameter. The obtained hybrids exhibit good photolithographic properties. The introduction of nanometer TiO2 leads to an increased refractive index and an increased glass transition temperature. The materials may have potential application in the preparation of optical devices. (C) 2002 Elsevier Science B.V. All rights reserved.