CdS thin films were grown by chemical bath on glass substrates and exposed to different annealing atmospheres over the range of temperatures 200-350 degreesC. Electrical, structural and optical properties as well stoichiometry of the films were investigated. Large changes on resistivity as a function of annealing temperature, and a limited temperature region yielding films with very low resistivity were found. Resistivity values as low as 0.05 Ohm cm are attained at the interval of temperature 240-260 degreesC in H-2 atmosphere. Resistivity values exhibit sharp increase in the region 260-300 degreesC as a result of the film-stoichiometry change on account of Cd evaporation.