Surface modification of titania nanoparticles was achieved by coating them with ultrathin alumina films using atomic layer deposition. The coating process was performed in a fluidized bed reactor at low pressure and under mechanical vibration. Films were deposited using self-limiting, sequential surface reactions of trimethylaluminum and water. The composition of alumina-coated particles was verified using infrared spectroscopy. The deposited films had an average growth rate of 0.2 nm/coating cycle and were highly uniform and conformal as demonstrated by transmission electron microscopy and X-ray spectroscopy. Deposited alumina films were amorphous as verified through X-ray diffraction and high-resolution electron microscopy. The coating process did not promote particle sintering as validated via particle size and surface area analysis.