화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.88, No.12, 3388-3396, 2005
Chemical solution deposition of (Pb1-xCax)TiO3 thin films with x similar to 0.5 as new dielectrics for tunable components and dynamic random access memories
Calcium lead titanate ((Pb,Ca)TiO3) thin films, with calcium contents of similar to 50 at.%, have been prepared by chemical solution deposition (CSD). Different synthetic sol-gel methods have been used for the preparation of the precursor solutions. 1,3-propanediol, OH(CH2)(3)OH, and water, H2O, were used as solvents. Lead (II) acetate trihydrate, Pb(OCOCH3)(2)center dot 3H(2)O, and titanium di-isopropoxide bis(acetylacetonate), Ti(OC3H7)(2)(CH3COCHCOCH3)(2), were used as reagents of lead and titanium, respectively. Calcium was incorporated into the solutions as calcium acetate hydrate, Ca(OCOCH3)(2)center dot xH(2)O, or as calcium acetylacetonate hydrate, Ca(CH3COCHCOCH3)(2)center dot xH(2)O. Only the use of calcium acetate led to precipitate-free solutions. Pb(II)-Ti(IV)-Ca(II) sols were obtained when calcium acetate was refluxed with the lead and titanium reagents in a diol-water solvent. These sols led to films with a homogeneous compositional profile. Solutions obtained by mixing a water solution of calcium acetate with a Pb(II)-Ti(IV) sol led to films with a heterogeneous compositional profile in which an interface between the film and the Pt bottom electrode is formed. The films derived from the Pb(II)-Ti(IV)-Ca(II) sols have values of dielectric constant at room temperature of similar to 500, which, together with their low leakage currents, low dielectric losses, and tunability, make these films promising for dynamic random access memories and tunable devices.