Pr3+-doped YF3 (orthorhombic), YO0.80F1.40 (orthorhombic), YOF (rhombohedral), and Y2O3 (cubic) films were synthesized on quartz-glass substrates through pyrolysis of a single-source trifluoroacetate precursor at temperatures between 400degrees and 900degreesC in air. Phase-selective deposition was achieved by controlling heating temperature and time. YF3, which formed first from the precursor, was transformed to YO0.80F1.40, YOF, and Y2O3, Photoluminescent properties of Pr3+-doped films were examined using ultraviolet excitation. An intense green photoluminescence was observed in the YOF:Pr3+ film, which was deposited at 700degreesC, through an efficient charge transfer (O2--Pr3+) excitation.