화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.86, No.12, 2122-2128, 2003
Atomic force and ultrasonic force microscopic investigation of laser-treated ceramic head sliders
The surface of laser-treated ceramic hard disk drive head sliders has been imaged with the atomic force microscope (AFM) and ultrasonic force microscope (UFM). The surface topography image from the AFM is compared with the elasticity image generated by the UFM on the same region. Images of the surface structure changes along with microcracking in the laser-treated regions are presented. The possible reasons for the development of microcracking and the enhanced contrast that the UFM provides of the microcracks and the material microstructure changes in the laser-treated region are discussed.