Photosensitive hybrid titania films have been prepared from titanium butoxide modified with beta-diketone and methacrylic acid. When this film is exposed to UV light, the beta-diketonato chelate from the alkoxide and beta-diketone is dissociated, and the unsaturated hydrocarbon of methacrylic acid is polymerized. These structural changes in the gel film have led to a difference between the solubility of irradiated and unirradiated parts in the film; therefore, a fine patternable hybrid titania film has been fabricated.