The effect of deposition conditions on the growth of yttria-stabilized zirconia (YSZ) films on textured silver substrates using the chemical vapor deposition (CVD) process was investigated. The crystalline structure of the YSZ film depended strongly on the deposition conditions, such as substrate temperature and deposition time. YSZ films prepared at 750degreesC using beta-diketone chelate sources, which had an orientation of c-axis normal to the textured silver substrate surface. The YSZ surface was dense but not rough, and the YSZ film grew granular-like. The cross-sectional image of YSZ film showed the columnar growth feature; the growth rate was similar to20 nm/min.