화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.84, No.11, 2521-2525, 2001
Rapid preparation of lead titanate sputtering target using spark-plasma sintering
PbTiO3 sputtering targets 8 cm in diameter were prepared using spark-plasma sintering (SPS) for relatively short periods, similar to2 min. Submicrometer-sized PbTiO3 powders with a relatively large size distribution were densiried to similar to 86% of the theoretical X-ray density using the SPS process. In contrast, large-sized (8 cm in diameter) ceramics could not be prepared from starting powders with a relatively narrow particle-size distribution. Formation of cracks in the large PbTiO3 targets was observed when samples were prepared under higher pressures (> 50 Mpa) or at higher temperatures (> 900 degreesC). Crack formation was attributed to unrelaxed internal stress originating from lower pore contents and from an inhomogeneous distribution of cations in the ceramics prepared under these conditions.