The hydrogen peroxide and hydrochloric acid are used in close proximity in the computer chip manufacture. The hydrochloric acid catalyzes an exothermic decomposition of hydrogen peroxide into oxygen and water. The accumulation of heat and non-condensable gas increases temperature and pressure in this reaction process always lead to runaway reaction and accident owing to inadvertent mixing. Thus, the chemical reaction hazard has to be clearly identified. Its critical runaway temperatures and unstable reaction criteria in this reaction process have to be determined urgently. In this investigation, we estimated its kinetic parameters at various volumetric ratios of the hydrogen peroxide to hydrochloric acid. Then, used these kinetic parameters to evaluate their critical temperatures and stable criteria in each reaction processes. The analytic results are important and useful for the design of safety system in the computer chip manufacture. (c) 2005 Elsevier B.V. All rights reserved.