Chemistry Letters, Vol.35, No.6, 582-583, 2006
Patterned metal deposition on si based on self-assembly and inkjet printing
A novel maskless and wet process for patterned metallization on a Si wafer was proposed, which incorporates an initial self-assembly of aminosilane as the organic glue layer followed by patterned inkjet printing of An colloids or Pd(II) species as the catalyst template and finalized by selective chemical plating to form desired patterns of metals.