Metal (Ta) films with ordered structures of nanometer-scale dimensions were fabricated by replicating the structure of a 2D array of ferritin molecules as a template. The deposition of a Ta layer onto a 2D array of ferritin molecules using ion-beam sputtering and subsequent removal of the ferritin molecules generated Ta films with an ordered array of concave with a 13 nm interval. The uniformity and chemical stability of Ta formed by ion-beam sputtering contributed to the precise replication of the fine structures of the 2D array of ferritin molecules.