Chemistry Letters, Vol.33, No.9, 1080-1081, 2004
CO2 sensing properties of La-loaded SnO2 thin films prepared by sputtering
The detection sensitivities of La-loaded SnO2 films prepared using reactive RF magnetron sputtering to CO2 were measured at various temperatures. The maximum sensitivity was attained at 200 degreesC for a film loaded with 5 atom % La. Pure SnO2 films revealed good crystallinity of the rutile phase. The crystallization of SnO2 films was suppressed by La loading.