Chemistry Letters, Vol.31, No.12, 1218-1219, 2002
Fabrication of ideally ordered nanohole arrays in anodic porous alumina based on nanoindentation using scanning probe microscope
Ideally ordered hole array structures in anodic porous alumina were prepared by pretexturing Al using a nanoindentation apparatus equipped with a scanning probe microscope. The shallow concaves formed by the nanoindentation initiated hole development, and guided the growth of holes during the anodization. Hole arrays with hole intervals from 100 to 400 nm were fabricated by changing the intervals of concaves by nanoindentation with the scanning probe microscope.