Chemistry Letters, Vol.31, No.9, 944-945, 2002
Enhancement of N concentration in ZnO codoped with Be and N atoms
ZnO films containing Be and N atoms have been prepared by sputtering of a target of ZnO with Be metal sheets in N-2 atmosphere. The length of c-axis of ZnO film is shortened with an increase of the Be concentration. The concentration of N atoms in a sputtered ZnO film is estimated to be 7.1%. which is about twice that of Be atoms.