We have developed a method for fabricating molecular device arrays using anodic aluminum oxide (AAO) templates. Silver was electrochemically deposited in the pores of AAO templates, after which benzene-1,4-dithiol was self-assembled, and silver was then deposited again. This method is relatively simple, easily reproducible, and mass producible. The molecular devices are uniform in size and they are well-ordered in a hexagonal pattern. The density of the devices is very high (similar to 1.0 x 10(10) devices/cm(2)). These well-ordered molecular devices could be used for fabricating nanoscale electronic devices. (c) 2006 Elsevier B.V. All rights reserved.