Vacuum-synthesized Ag nanoparticles were dispersed and immobilized on an organosilane-functionalized glass surface in water. Nearly spherical particles with diameters of approximate to 200 nm were used for a substrate for surface enhanced Raman scattering (SERS). Molecules deposited on this substrate in both gas and liquid phases were detected by SERS. The SERS efficiency of this substrate was compared with that of Ag colloidal substrate and the morphological difference of these SERS substrates was studied by scanning electron microscopy. The aggregates of 5-10 Ag nanoparticles formed at the spread area exhibited prominent SERS activity. (c) 2005 Elsevier B.V. All rights reserved.