Patternable TiO2/organically modified silane hybrid films are synthesized by the sol-gel spin-coating technique. Optical properties and patterning of the hybrid film are studied. A continuous relief grating is fabricated by one-step spin-coating process followed by direct ultraviolet light imprinting based on a holographic interference lithographic system. UV-Visible (UV-Vis) spectroscopy and Fourier transform infrared spectroscopy have been used to study the optical and structural properties of the hybrid film. The propagation loss properties of the planar waveguide have also been estimated. The hardness and Young's modulus of the films show a dependence on the heat-treatment temperature. (C) 2003 Elsevier Science B.V. All rights reserved.