Zn1-xFexO (x=0, 0.052, 0.103, 0.157 and 0.212) films were prepared by the radio-frequency magnetron sputtering technique on Si (111) substrates and the microstructure of which was characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy. The samples had a preferential c-axis orientation and the position of (002) diffraction peak shifted to the lower degree side with increasing Fe component. In order to investigate the optical transmittance properties of Zn1-xFexO films, we prepared the films on Al2O3 (001) substrates simultaneity and the UV-VIS optical transmittance spectra showed that the band gap energy of Zn1-xFexO films decreased with increase of Fe concentration. Photoluminescence spectra of the samples were observed at room temperature. (C) 2007 Elsevier B.V. All rights reserved.