Monodispersed and well-aligned samples of TiO2 nanosquares were synthesized in large quantities in the presence of tetramethylammonium hydroxide (TMAOH) for the first time. These nanosquares were single crystals characterized by slightly truncated shape bounded by {101} facets. XRD, AFM, FT-IR, Raman scattering, TEM and HRTEM were employed to characterize the as-prepared samples. The possible microreaction mechanism was discussed. As a result, TMAOH accelerates the formation of crystalline anatase and plays a structural template role to modify the particle shape to nanosquare. Moreover, TMAOH reacted with hydrolysates and formed layered structural complex compound. (c) 2007 Elsevier Inc. All rights reserved.