Ligand removal from supported iridium catalysts prepared by atomic layer deposition from Ir(acac)(3) was studied by direct reduction in hydrogen flow and by calcination in oxygen flow followed by reduction in hydrogen flow, as well as by thermogravimetric analysis. Thermal decomposition of acac ligand residuals required high temperatures, and in samples containing no iridium the removal of carbonaceous species was not complete. Metallic iridium particles less than 2 nm in size were formed during direct reduction and larger particles upon calcination followed by reduction. The activity of the catalysts in toluene hydrogenation in most cases depended on particle size.