화학공학소재연구정보센터
Thin Solid Films, Vol.515, No.7-8, 3315-3322, 2007
Fabrication of patterned and non-patterned metallic nanowire arrays on silicon substrate
Patterned micropads, 50 micrometer (mu m) in diameter, comprising of multiple metallic nanowires are fabricated directly on a silicon substrate. Nanoporous alumina membrane that is used as a template for electrodeposition of nanowires is synthesized by potentiostatic anodization of a thin film of aluminum. For Patterned nanoporous film growth, prior to anodization the thin film of aluminum is patterned with SiO2 that acts as an effective barrier to anodization. Nanopore diameter for the patterned thin film is varied from 39 to 150 unit by varying the anodization voltage from 20 to 195 V The Patterned nanoporous alumina thin film that is anodized at 60 V and is I pin thick is used as a template for electrodeposition of nickel nanowires. Nickel nanowires that are similar to 5 mu m long are also fabricated on a silicon substrate using a thicker alumina film as an electrodeposition template. (c) 2006 Elsevier B.V All rights reserved.