Thin Solid Films, Vol.515, No.4, 2730-2733, 2006
First principles study of vacancies and Al substitutional impurities in delta-TiN
The vacancies and aluminum substitutional impurities in the delta phase of titanium nitride have been studied through first principles spin polarized density functional theory calculations. Final structures and atomic charges are described and analyzed. The calculated formation energies show that N vacancies are probable to occur in Ti rich environments, while Ti vacancies and Al substitutional impurities appear at N rich conditions. (c) 2006 Elsevier B.V. All rights reserved.