Chemically synthesized (Bi3.15Nd0.85)Ti3O12 (BNT) films annealed at 650 degrees C for 15 min were prepared by different approaches to improve their fatigue problem. These approaches involved the selection of substrates with different overlayers, the addition of hydrogen peroxide (H2O2) to a spin-coating solution, and annealing in different atmospheres. BNT films on Ti-overlayered substrates had performed badly if processed at oxidation environments. BNT films on TiO2-overlayered substrates displayed stable and unchanged fatigue endurance if the spin-coating solution was modified by drops of the H2O2 solution to lesson the formation of oxygen vacancies in crystalline films. They were also fatigue-free in ferroelectricity after 10(10) switching cycles and had remanent polarization of 24 mu m/cm(2), coercive field of 52 kV/cm, nonvolatile charge density of 13 mu C/cm(2) during relaxed fatigue tests, and leakage current of 10(-6) A at 3 V. (c) 2006 Elsevier B.V. All rights reserved.