Terpolymers consisting of gamma-butyrolactone-2-yl methacrylate, 2-methyl-2-adamantyl methacrylate, and 1-methyl-1-(6-methyl-7-oxabicyclo[4,1,0]hept-3-yl)ethyl methacrylate were prepared by the reversible addition-fragmentation chain transfer polymerization technique. The molecular weight distribution of the polymers was 1.29-1.39. Although the polymers have epoxy units and cross-linking of the polymer occurred during prebake treatment, they worked as a highly sensitive positive-tone resist. The cross-linking efficiency of the resist was dependent on the type of amines used as a quencher. The line edge roughness values were dependent on the prebake temperature. (c) 2006 American Vacuum Society.